针对高灵敏度的光纤布拉格光栅(FBG)振动传感器的抗冲击可靠性,设计了一种具有限振结构的双悬臂梁型FBG振动传感器,理论分析了结构参数与灵敏度和振动位移的关系,进行了结构优化,确定了限振幅度。制作了限振幅度约为90 μm的传感器样品,对传感器的加速度灵敏、频率响应、抗冲击性能进行了测试,结果表明,传感器的加速度灵敏度达到525 pm/g,谐振频率约为66 Hz,传感器经过50 g反复冲击,频响特性具有良好重复性,表明传感器具有较高的可靠性。

For the shock reliability of high-sensitive fiber Bragg grating(FBG) vibration sensor, a dual cantilever FBG vibration sensor with a vibration restricting structures was designed. The relationship between the structural parameters, sensitivity and vibration displacement were analyzed, the structure was optimized and the limit of the vibration amplitude was determined. Sensor sample with a vibration restricting amplitude of about 90 μm was fabricated, and the acceleration sensitivity, frequency response, impact properties of the sensors were tested. The results show that the acceleration sensitivity of the sensor is about 525 pm/g, the resonance frequency is about 66 Hz, and after repeated shocks of about 50 g, the frequency response shows good reproducibility, which indicates that the sensor has a high reliability.