Collection Of theses on high power laser and plasma physics, 2016, 14 (1): 0904002, Published Online: May. 26, 2017
Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements
测量 功率谱密度 干涉仪 中频波面误差 仪器传递函数 measurement power spectral density interferometer mid-spatial frequency wavefront error instrument transform function
Abstract
In order to investigate the response law of different interferometers to the mid-spatial frequency errors and obtain the relatively true power spectral density (PSD) distribution, the 4D AccuFiz, ZYGO DynaFiz and ZYGO GPI interferometers are respectively used to measure the periodic ripples and scratch samples, and the comparative analysis of the measured one-dimension PSD curves is made. The results show that the responsivities to the mid- and high-spatial frequency information are different for different interferometers, and the higher the interferometer resolution is, the higher the responsivity is. The instrument transfer function (ITF) curve is used to correct the measured PSD, and the truer PSD distribution is obtained. However, in the range of some frequency bands, there still exist some difference between the ITF curve and the practical response.
Yang Xianghui, Shen Weixing, Zhang Xuejie, Ma Xiaojun. Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements[J]. Collection Of theses on high power laser and plasma physics, 2016, 14(1): 0904002.