半导体光电, 2016, 37 (4): 477, 网络出版: 2016-09-12
SOI基PLC型阵列波导光栅与可调光衰减器单片集成
Monolithically Integration of SOI-based PLC-type Arrayed Waveguide Grating and Variable Optical Attenuator
阵列波导光栅 可调光衰减器 波分复用 绝缘体上硅 平面光波回路 arrayed waveguide grating variable optical attenuator wavelength division multiplexing silicon on insulator monolithic integration
摘要
制作了基于绝缘体上硅(Silicon on Insulator, SOI)材料的8×16通道的阵列波导光栅(Arrayed Waveguide Grating, AWG)与电吸收型可调光衰减器(Variable Optical Attenuator, VOA)的单片集成器件, 其信道间隔为200GHz。该集成器件采用脊形波导结构, 其截面尺寸为亚微米级, 整体尺寸为2.9mm×1mm。该VMUX器件的片上损耗为9.324~10.048dB, 串扰为6.5~8.2dB; 在20dB衰减下, 单通道最大功耗为87.98mW; 最大信道偏振相关损耗(Polarization Dependent Loss, PDL)为0.461dB, 16通道的衰减一致性为0.245dB。该器件能够实现良好的波分复用/解复用及信道功率均衡的功能。
Abstract
In this paper, the monolithically integration of a 8×16 arrayed waveguide grating and electrical absorption variable optical attenuator with the channel spacing of 200GHz was illustrated and fabricated based on silicon-on-insulator (SOI) platform. A rib waveguide with a sub-micron cross section was adopted and its overall footprint is 2.9mm×1mm. The on-chip loss of the VMUX device is 9.324~10.048dB and its crosstalk is 6.5~8.2dB. For the 16 output channels, the maximum single-channel power consumption is 87.98mW, the maximum polarization dependent loss is 0.461dB and the loss uniform of the 16 channels is 0.245dB. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.
袁配, 吴远大, 王玥, 安俊明, 胡雄伟. SOI基PLC型阵列波导光栅与可调光衰减器单片集成[J]. 半导体光电, 2016, 37(4): 477. YUAN Pei, WU Yuanda, WANG Yue, AN Junming, HU Xiongwei. Monolithically Integration of SOI-based PLC-type Arrayed Waveguide Grating and Variable Optical Attenuator[J]. Semiconductor Optoelectronics, 2016, 37(4): 477.
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