半导体光电, 2016, 37 (3): 318, 网络出版: 2016-09-14
用于迫弹速度测量的柔性MEMS流速传感器仿真
Simulation of Flexible MEMS Flow Sensor for Speed Measurement of Mortar Bomb
摘要
大部分迫弹采用引信涡轮发电机兼作为弹道辨识用的速度传感器, 但是涡轮发电机存在着低速停转和高速限速等测速问题。设计了一种贴装在引信上测量迫弹飞行速度的宽量程柔性MEMS流速传感器。利用有限元仿真软件对迫弹引信进行了流场仿真, 确定了流速传感器在引信进气道内的贴装位置, 并对传感器进行了热-流场耦合仿真。引信流场仿真表明, 拉法尔管进气道后端壁面处流速与迫弹飞行速度为近似线性关系: 迫弹飞行速度0~350m/s对应壁面流速为0~75m/s。进气道内安装的柔性流速传感器的热-流场耦合仿真表明, 由传感器加热电阻的加热功率和三个测温电阻对的温度差可测量0.01~75m/s的流速, 这为传感器用于迫弹的弹道辨识奠定了理论基础。
Abstract
Turbine alternator used as the velocity sensor of the mortar bomb to achieve trajectory discrimination has limitations such as stalling at low speed and speed limit at high speed. A wide-range flexible MEMS flow velocity sensor, which can be mounted on the fuze to measure flight speed of the mortar bomb, is designed. The FEM software is employed to simulate flow field of the fuze and thermal-flow coupling field of the properly mounted sensor in the fuze. The flow field simulation of the fuze shows that the flow velocity of the area where the sensor is mounted approximately has a linear relationship with flight speed of the bomb, that is, 0~350m/s of the flight speed is corresponding to 0~75m/s of the inlet flow velocity. The simulation results of the mounted flexible flow velocity sensor in the fuze show that a wide range of flow velocity, from 0.01 to 75m/s, can be measured through heating power of the heater and temperature differences of three pairs of sensing resistors, which lays a theoretical foundation for the sensor used for trajectory discrimination of the mortar bomb.
曾庆贵, 崔峰, 杨刚, 刘武, 陈文元, 张卫平. 用于迫弹速度测量的柔性MEMS流速传感器仿真[J]. 半导体光电, 2016, 37(3): 318. ZENG Qinggui, CUI Feng, YANG Gang, LIU Wu, CHEN Wenyuan, ZHANG Weiping. Simulation of Flexible MEMS Flow Sensor for Speed Measurement of Mortar Bomb[J]. Semiconductor Optoelectronics, 2016, 37(3): 318.