设计了一种能够工作在140~325 GHz频带的宽带准光检波器,由一颗高阻硅透镜和单片集成检波芯片组成.设计并加工出双缝天线,在天线馈电端集成了肖特基二极管,该紧凑结构使其能够接收空间中的太赫兹辐射并转换为基带信号.为增强片上天线的方向性,利用MLFMM算法进行了扩展半球硅透镜的设计和优化,实现了良好的辐射特性.通过测试,天线在220 GHz和324 GHz处的辐射增益分别为26 dB和28 dB.在140~325 GHz,检波器测试得到的响应率可达到1 000~4 000 V/W,对应的等效噪声功率(NEP)估算为0.68~273 pW/Hz.

A broadband terahertz quasi-optical detector has been developed with frequency from 140 GHz to 325 GHz. The terahertz quasi-optical detector consists of a silicon lens with high resistivity and a monolithic detector chip. A double slot antenna was fabricated on the chip with a Schottky diode assembled cross the terminals of the antenna. This compact structure endows the chip with the functions of receiving THz radiations from space and converts them into baseband. To improve the directivity of the antenna on chip, the hyper-hemispherical silicon lens was designed and optimized by MLFMM (Multilevel Fast Multipole Method)) algorithm, resulting in good radiation performance. The antenna gains at 220 GHz and 324 GHz was calculated to be 26 dB and 28 dB, respectively, from the measured radiation patterns. The measured responsivities of the detector achieve 1 000~4 000 V/W from 140 GHz to 325 GHz and the noise equivalent powers (NEP) were estimated to be 0.68~2.73 pW/Hz.