介绍了一种用于工作波段0.4～2.5 μm超光谱成像系统中消高级次光谱集成滤光片的设计与研制.针对offner凸面光栅分光的工作特点,通过在同一光学基片上划分三块不同的几何区域,分波段实现超光谱成像仪全光谱范围内因光栅分光引起高级次光谱的抑制与消除,同时保证工作波段的光学效率优于93%.采用精细掩模技术,保证不同波段之间过渡区域的尺寸小于30 μm,有效提高光谱利用效率.

An integrated order blocking filter covering the wavelength range from 0.4μm to 25μm was designed and fabricated for the hyperspectral imaging system. Based on the characteristics of the reflective Offner convex grating dispersion, the optical substrate is divided into three areas with different working band to block the high-level spectra. The optical transmittance efficiency of each band is higher than 93%. Fine mask technique was adopted to ensure the size of adjacent area between different band less than 30 μm. The spectra utilization efficiency is improved effectively.