激光与光电子学进展, 2016, 53 (10): 100603, 网络出版: 2016-10-12
光纤布拉格光栅耐海水腐蚀温度增敏传感器 下载: 509次
Fiber Bragg Grating Temperature Sensitization Sensor with Seawater Corrosion-Resistance
光纤光学 光纤传感器 耐海水腐蚀 增敏薄膜 光纤布拉格光栅 fiber optics fiber sensors seawater corrosion-resistance sensitization film fiber Bragg grating
摘要
采用电镀法和磁控溅射法设计了一种电镀增敏铜薄膜和耐海水腐蚀碳薄膜的微型光纤布拉格光栅(FBG)温度传感器。当海水温度范围为0~50 ℃时,设计的FBG温度增敏传感器的布拉格波长与海水温度呈线性关系,线性系数高达99.99%。 温度灵敏度可由电镀时间和电流精确控制。将镀铜薄膜探头、镀铜薄膜和二氧化硅薄膜探头、镀铜薄膜和碳薄膜探头的温度特性和抗海水腐蚀特性作对比。结果表明,传感器的温度灵敏度系数随铜薄膜层厚度呈指数增长,铜薄膜层厚度随电镀时间呈线性增长,碳薄膜层的类金刚石结构可抑制增敏铜薄膜层在海水中的腐蚀。
Abstract
A miniature fiber Bragg grating (FBG) temperature sensor with a galvanized sensitization copper film and a seawater corrosion-resistant carbon film is designed by the electroplating process and the magnetron sputtering. When the seawater temperature within the range of 0~50 ℃, the Bragg wavelength of the FBG temperature sensitization sensor is linear with the seawater temperature, and the linear coefficient is nearly 99.99%. The temperature sensitivity can be precisely controlled by the electroplating time and the electric current. The properties of temperature and the seawater corrosion-resistance of the three kinds of sensing probes, e.i., the probe with copper plating film, the probe with copper and carbon plating film, the probe with copper and silica plating film, are analyzed. The results show that the temperature sensitivity coefficient increases exponentially with the copper film thickness, and the copper film thickness increases linearly with the plating time. The carbon film with the diamond-like structure can inhibit the corrosion of the sensitization copper film in seawater.
高晓丹, 屈亚朋, 王瑶. 光纤布拉格光栅耐海水腐蚀温度增敏传感器[J]. 激光与光电子学进展, 2016, 53(10): 100603. Gao Xiaodan, Qu Yapeng, Wang Yao. Fiber Bragg Grating Temperature Sensitization Sensor with Seawater Corrosion-Resistance[J]. Laser & Optoelectronics Progress, 2016, 53(10): 100603.