红外与毫米波学报, 2016, 35 (5): 520, 网络出版: 2016-10-24
基于超薄钽酸锂晶体材料高响应太赫兹探测器
High responsivity of terahertz detector based on ultra-thin LiTaO3 crystal material
太赫兹探测器 钽酸锂晶片 化学研磨及机械抛光 电压响应率 噪声等效功率 THz detector Lithium tantalate (LiTaO3) wafer chemical grinding and mechanical polishing Voltage responsivity noise equivalent power
摘要
太赫兹(Thz)探测器工作在室温条件下极大地促进了太赫兹科学与技术的应用。超薄(10μm)钽酸锂(LiTaO3)晶片被用作太赫兹探测器敏感元材料。基于钽酸锂晶片太赫兹探测器在2.52 THz激光辐射源照射下, 20Hz斩波频率时响应率可达到8.38×104V/W, 等效噪声功率NEP)可达到1.26×10-10W。这种加工超薄钽酸锂晶片的方法为制备高响应率太赫兹探测器提供了一个可行的方法。
Abstract
Terahertz (THz) detector work at room temperature could greatly expand the application of THz science and technology. Ultra-thin(10μm)lithium tantalate crystal (LiTaO3) material was used as sensitive layer of the detector. The responsivity could reach up to 8.38×104V/W and the noise equivalent power (NEP) could be as low as 1.26×10-10W at 20Hz operating frequency by laser radiation source at 2.52 THz. Furthermore, this processing method to fabricate the ultra-thin LiTaO3 crystal material could potentially provide a feasible approach for even higher response terahertz detectors.
梁志清, 刘子骥, 蒋亚东, 郑兴, 王涛, 于贺. 基于超薄钽酸锂晶体材料高响应太赫兹探测器[J]. 红外与毫米波学报, 2016, 35(5): 520. LIANG Zhi-Qing, LIU Zi-Ji, JIANG Ya-Dong, ZHENG Xing, WANG Tao, YU He. High responsivity of terahertz detector based on ultra-thin LiTaO3 crystal material[J]. Journal of Infrared and Millimeter Waves, 2016, 35(5): 520.
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