激光与光电子学进展, 2016, 53 (11): 111402, 网络出版: 2016-11-14
CVD金刚石薄膜锥形阵列微孔激光加工实验研究
Experimental Study on Laser Processing Arrayed Conical Micro-Holes of CVD Diamond Films
激光技术 阵列锥形微孔 光纤激光 CVD金刚石薄膜 微细加工 laser technique arrayed conical micro-holes fiber laser CVD diamond film micro-machining
摘要
采用光纤脉冲激光器对化学气相沉积金刚石薄膜进行了锥形微孔阵列加工,研究了激光扫描速度、扫描次数和脉冲宽度等参数对微孔形状和尺寸的影响规律。研究发现,激光扫描速度对微孔尺寸的影响不明显。而激光扫描次数对微孔出口直径影响明显。随着激光脉宽的增加,微孔深度和出口直径均增加,但微孔锥度减小。
Abstract
The arrayed conical micro-holes are drilled by pulse fiber laser on chemical vapor deposition diamond films. The influence of such parameters as laser scanning speed, scanning times and pulse width on the shape and size of micro-holes are investigated. The results show that the laser scanning speed has less obvious influence on the micro-hole dimension, in contrast, laser scanning times have significant influence on the micro-hole exit diameter. With the increment of laser pulse width, the micro-hole depth and exit diameter both increase, but the micro-hole conical degree decreases.
王鹏, 张凤林, 刘文广, 欧阳承达. CVD金刚石薄膜锥形阵列微孔激光加工实验研究[J]. 激光与光电子学进展, 2016, 53(11): 111402. Wang Peng, Zhang Fenglin, Liu Wenguang, Ouyang Chengda. Experimental Study on Laser Processing Arrayed Conical Micro-Holes of CVD Diamond Films[J]. Laser & Optoelectronics Progress, 2016, 53(11): 111402.