为了实现对快速运动目标的跟踪成像或记录其快速变化的过程, 研制了一种高帧频64×64元蓝光响应增强CCD。该器件的存储区采用漏斗形结构以提高其工作频率, 光敏元采用多蓝光窗口来提高其蓝光响应, 衬底采用较高的电阻率50Ω·cm从而提高了其红光响应, 采用MPP技术来降低暗电流。器件的帧频为2000f/s, 在450~900nm波长范围的平均量子效率为45%, 动态范围达到15000∶1, 暗电流为30pA/cm2。

In order to track and image fast moving target or record its rapid changing process, a kind of 64×64 pixels enhanced blue spectrum response CCD with high frame rate is developed. The storage area of the device has a peculiar funnel structure to improve its working frequency. Also multiple blue window structure is employed by photosensitive unit to enhance its blue spectrum response. The device is designed with higher resistivity substrate of 50Ω·cm in order to increase its infrared spectrum response, and MPP techniques are used to reduce the dark current. The results of device test indicate that it has a frame rate of 2000f/s, wavelength between 450~900nm with its average quantum efficiency of 45%, dynamic range with a level of 15000∶1 and the dark current level is 30pA/cm2.