研究了大尺寸薄膜晶体管液晶显示器产品开发中遇到的一种新的条状显示不均。通过扫描电子显微镜、四探针测试仪和分光光度计设备对这种显示不均进行了分析, 这种显示不均与薄膜晶体管阵列基板上的金属配线的膜厚周期性波动有关, 金属膜厚的周期性波动导致了液晶显示器的液晶盒盒厚的不均匀, 从而造成显示不均。这种膜厚的周期性波动与液晶高世代线广泛采用的平面靶材溅射设备构造有关。通过对设备结构的改造, 提高了基板面内的金属膜厚的均一性, 改善了此不良。

A new unknown block mura of large size TFT-LCD has been studied in this paper. The mura was observed by SEM, Four-probe tester and Spectrophotometer. It is caused by the periodic changing of TFT metal line thickness. The periodic changing of metal line thickness led to the changing of LCD cell gap, influencing display quality of TFT-LCD. The periodic changing metal line thickness is caused by adopting the structure of a kind of flat target magnetron sputter equipment, which is used in large size TFT-LCD production line widely. The thickness uniformity of metal line was improved by modifying the equipment structure. The mura disappeared after the thickness uniformity is improved.