光电工程, 2016, 43 (9): 84, 网络出版: 2016-12-09  

数字微镜器件热设计计算与试验验证

Thermal Design, Calculation and Verification of Digital Micro-mirror Device
作者单位
中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室 超精密光学工程研究中心,长春 130033
摘要
为保证数字微镜器件(DMD)的温度水平满足要求,采用计算和试验相结合的方法,对DMD 热设计进行了研究。通过设计强迫液体冷却的散热方案,计算DMD 各个测温点的温升,得出反射红、绿、蓝光的DMD 最大温升分别为14.4 ℃、11.3 ℃、10.2 ℃,通过试验对热设计方案及计算结果进行了验证,试验结果与计算结果最大偏差不超过2.5 ℃,试验表明,所设计的热设计方案可靠,温升计算正确,为整机热设计和优化提供了理论依据。
Abstract
To ensure a proper temperature rise of a Digital Micro-mirror Device (DMD), the thermal design of DMD was studied by calculation and experiment. A forced liquid-cooled thermal design was presented, and the temperature rise of each measurement point on DMD was calculated. Calculation results show that the maximum temperature rise of the DMD reflecting red light is 14.4℃, the maximum temperature rise of the DMD reflecting green light is 11.3 ℃, and the maximum temperature rise of the DMD reflecting blue light is 10.2 ℃, which have met the working temperature requirements. Thermal design and calculation are also verified through a thermal test and the maximum deviation between thermal calculation and thermal test are not exceeding 2.5 ℃. The thermal tests verify the reliability of thermal design and the correctness of thermal calculation, and supply a theoretical warrant for thermal design optimizing of DLP digital cinema projector.

王飞, 周连生, 方斌, 田伟, 张巍, 隋永新. 数字微镜器件热设计计算与试验验证[J]. 光电工程, 2016, 43(9): 84. WANG Fei, ZHOU Liansheng, FANG Bin, TIAN Wei, ZHANG Wei, SUI Yongxin. Thermal Design, Calculation and Verification of Digital Micro-mirror Device[J]. Opto-Electronic Engineering, 2016, 43(9): 84.

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