光谱学与光谱分析, 2016, 36 (3): 635, 网络出版: 2016-12-09
磁控共溅射低温制备多晶硅薄膜及其特性研究
Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature
共溅射 铝诱导晶化 低温退火 多晶硅 特性 Co-sputtering Aluminum induced crystallization Polycrystalline silicon films Properties
摘要
多晶硅在光电子器件领域具有较为重要的用途。 利用磁控溅射镀膜系统, 通过共溅射技术在玻璃衬底上制备了非晶硅铝(α-Si/Al)复合膜, 将Al原子团包覆在α-Si基质中, 膜中的Al含量可通过Al和Si的溅射功率比来调节。 复合膜于N2气氛中进行350 ℃, 10 min快速退火处理, 制备出了多晶硅薄膜。 利用X射线衍射仪、 拉曼光谱仪和紫外-可见光-近红外分光光度计对多晶硅薄膜的性能进行表征, 研究了Al含量对多晶硅薄膜性能的影响。 结果表明: 共溅射法制备的α-Si/Al复合膜在低温光热退火下晶化为晶粒分布均匀的多晶硅薄膜; 随着膜中Al含量逐渐增加, 多晶硅薄膜的晶化率、 晶粒尺寸逐渐增加, 带隙则逐渐降低; Al/Si溅射功率比为0.1时可获得纳米晶硅薄膜, Al/Si溅射功率比为0.3时得到晶化率较高的多晶硅薄膜, 通过Al含量的调节可实现多晶硅薄膜的晶化率、 晶粒尺寸及带隙的可控。
Abstract
The polycrystalline silicon thin films play an important role in the field of electronics. In the paper, α-SiAl composite membranes on glass substrates was prepared by magnetron co-sputtering. The contents of Al radicals encapsulated in the α-Si film can be adjusted by changing the Al to Si sputtering power ratios. The as-prepared α-Si films were converted into polycrystalline films by using a rapid thermal annealing (RTP) at low temperature of 350 ℃ for 10 minutes in N2 atmosphere. An X-ray diffractometer, and Raman scattering and UV-Visible-NIR Spectrometers were used to characterize the properties of the Pc-Si films. The influences of Al content on the properties of the Pc-Si films were studied. The results showed that the polycrystalline silicon films were obtained from α-SiAl composite films which were prepared by magnetron co-sputtering at a low temperature following by a rapid thermal annealing. The grain size and the degree of crystallization of the Pc-Si films increased with the increase of Al content, while the optical band gap was reduced. The nc-Si films were prepared when the Al to Si sputtering power ratio was 0.1. And a higher Crystallization rate (≥85%) of polycrystalline silicon films were obtained when the ratio was 0.3. The band gaps of the polycrystalline silicon films can be controlled by changing the aluminum content in the films.
段良飞, 杨雯, 张力元, 李学铭, 陈小波, 杨培志. 磁控共溅射低温制备多晶硅薄膜及其特性研究[J]. 光谱学与光谱分析, 2016, 36(3): 635. DUAN Liang-fei, YANG Wen, ZHANG Li-yuan, LI Xue-ming, CHEN Xiao-bo, YANG Pei-zhi. Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature[J]. Spectroscopy and Spectral Analysis, 2016, 36(3): 635.