将增透亚波长光栅分别置于微机电系统 (MEMS)波长可调谐垂直腔面发射激光器 (VCSEL)的内腔、上分立布拉格反射器(DBR)的上表面和下表面, 分析了其对器件波长调谐范围、驻波场和谐振腔波长的影响。通过建模计算可知, 当亚波长光栅置于MEMS波长可调谐VCSEL的内腔中时, 波长调谐量最大, 可达54 nm; 光栅置于上DBR的上表面和下表面时, 波长调谐量仅能达到40 nm和33 nm。通过分析驻波场可以发现, 当亚波长光栅置于上DBR的上表面时, 有源区能量占总能量的0.36%, 而置于上DBR的下表面和内腔时分别为0.08%和0.02%。比较三种结构的谐振腔波长可以发现, 对于光栅在内腔和上DBR的下表面时, 横电(TE)和横磁(TM)偏振对应的谐振腔波长分别出现了8.3 nm和10.1 nm的分离, 而光栅放置在上DBR的上表面时两个偏振波长并没有偏离, 由此可知, 光栅在内腔和上DBR的下表面实现偏振稳定原理与光栅在上DBR的上表面时是不同的。

The anti-reflection sub-wavelength gratings are placed at the inner cavity of the micro-electro-mechanical system (MEMS) wavelength tunable vertical cavity surface emitting laser (VCSEL), top surface and bottom surface of the top distributed Bragg reflectors(DBR), respectively. The effects of the positions on the wavelength tuning range, the standing wave field and the resonant cavity wavelength are analyzed. The simulation results demonstrate that when the sub-wavelength grating is placed in the inner cavity of the MEMS wavelength tunable VCSEL, the largest wavelength tuning range can be achieved, which can reach 54 nm, while the largest wavelength tuning ranges for the other two structures are 40 nm and 33 nm, respectively. It is known by analysis of the standing wave field that the active region energy is 0.36% of the total energy when the sub-wavelength grating is set on the top surface of the top DBR, while it is 0.08% and 0.02% when the sub-wavelength gratings are set in the inner cavity and on the bottom surface of the top DBR. In addition, the resonant cavity wavelength with the corresponding to the transverse electric (TE) and transverse magnetic (TM) polarizations appears the separation of 8.3 nm and 10.1 nm when the sub-wavelength gratings are put in the inner cavity and on the bottom surface of the top DBR, while it has not separation for the top surface of the top DBR. Thus, the polarization stable principles of the three structures are different.