光学技术, 2016, 42 (6): 534, 网络出版: 2016-12-23
硅V型槽表面形貌的OCT可视化测量
Visualization measurement for the surface topology of silicon V-groove using optical coherence tomography (OCT)
V型槽 表面形貌 谱域 可视化 OCT optical coherence tomography V-groove surface topography spectral-domain visualization
摘要
介绍了一种硅V型槽表面形貌测量的可视化方法, 分析了谱域OCT的测量原理。利用谱域OCT实验测量系统进行了硅V型槽的成像实验, 得到了硅V型槽的二维层析图像; 通过分析二维层析图像, 获取了硅V型槽的结构尺寸, 实现了硅V型槽表面形貌的高精度可视化测量。
Abstract
A visualization measurement method for silicon V-groove surface topology is introduced. The principle of spectral-domain optical coherence tomography (OCT) is analyzed. The imaging experiment is performed on the silicon V-groove by the experimental spectral-domain OCT system. The two-dimensional cross-sectional image is obtained, and the construction dimension is obtained by analyzing the two-dimensional cross-sectional image. It can reach visualization measurement method for silicon V-groove surface tomography with high accuracy.
秦玉伟. 硅V型槽表面形貌的OCT可视化测量[J]. 光学技术, 2016, 42(6): 534. QIN Yuwei. Visualization measurement for the surface topology of silicon V-groove using optical coherence tomography (OCT)[J]. Optical Technique, 2016, 42(6): 534.