光子学报, 2016, 45 (12): 1228003, 网络出版: 2016-12-26
基于蓝宝石晶片的光纤法布里-珀罗高温传感器
Fiber-optic Fabry-Perot High-temperature Sensor Based on Sapphire Wafer
光纤法珀传感器 蓝宝石晶片 高温测量 蓝宝石光纤 算法 Fiber-optic Fabry-Perot sensor Sapphire wafer High temperature measurement Sapphire fiber Algorithm
摘要
提出并研制了一种基于蓝宝石晶片的光纤法布里-珀罗(法珀)高温传感器.该传感器采用斜端面蓝宝石光纤作传输波导, 蓝宝石晶片作法珀干涉仪, “陶瓷插芯-陶瓷套管”结构做为传感器的固定结构.通过傅里叶变换-最小均方差联合算法解调传感器的反射光谱, 实现了20℃~1 000℃范围内的温度测量, 测试准确度为±2.5℃.该传感器具有体积小、成本低、制作简单以及重复性高的优点, 可用于高温环境下稳定、精确的温度测量.
Abstract
A fiber-optic Fabry-Perot (F-P) high-temperature sensor based on sapphire wafer was proposed and fabricated. The sensor uses the sapphire fiber with angled end face as a transmission waveguide, the sapphire wafer as a Fabry-Perot (F-P) interferometer and the structure of “Zirconia ferrule-Zirconia tube”as the fixing structure of the sensor. The reflection spectrum of the interferometer was demodulated by performing a combined algorithm of fast Fourier transform algorithm and minimum mean square error estimation.Temperature ranged from 20℃ to 1000℃ is measured, and the obtained precision is ±2.5℃. The sensor has the advantages of small size, low cost, simple fabrication and high repeatability. It can be applied for stable and accurate temperature measurement in high temperature environments.
梁伟龙, 周次明, 范典, 欧艺文, 田涛, 桂新旺, 李岩. 基于蓝宝石晶片的光纤法布里-珀罗高温传感器[J]. 光子学报, 2016, 45(12): 1228003. LIANG Wei-long, ZHOU Ci-ming, FAN Dian, OU Yi-wen, TIAN Tao, GUI Xin-wang, LI Yan. Fiber-optic Fabry-Perot High-temperature Sensor Based on Sapphire Wafer[J]. ACTA PHOTONICA SINICA, 2016, 45(12): 1228003.