红外技术, 2016, 38 (12): 1020, 网络出版: 2017-01-03
VO2薄膜常见制备方法综述
Review of the Common Preparation Methods of VO2 Thin Films
相变材料 VO2制备方法 脉冲激光沉积工艺 分子束外延法 磁控溅射法 phase change material VO2 preparation methods pulsed laser deposition process (PLD) molecular beam epitaxy (MBE) magnetron sputtering
摘要
VO2是一种相变温度为 68℃接近室温的热致相变材料,具有十分广泛的潜在应用价值,自从被发现以来针对它的研究就从未停止。如何使用恰当的制备方法简单、快速的制备性能良好的 VO2薄膜一直是研究的热点之一。目前, VO2薄膜常见的制备方法主要有蒸发法、溶胶 -凝胶法、脉冲激光沉积工艺、分子束外延法及磁控溅射法等。本文详细介绍了每种方法的相应制备原理与国内外研究现状,并用表格的方式简洁明了地对比出每种方法的优势与不足,为不同条件下 VO2薄膜的制备方法的选择提供了参考。同时,本文也对未来研究方向做出展望,对今后 VO2薄膜的制备与应用研究有重要的借鉴意义。
Abstract
VO2, a type of thermally induced phase change material, whose phase transition temperature is 68℃ (closest to room temperature), has a very wide potential application value. The research on it has never ceased since its discovery. How to use a proper preparation method to prepare the VO2 thin film with good performance has remained a hot research in recent years. Currently, metal thermal evaporation, sol-gel, pulsed laser deposition(PLD), magnetron sputtering, and molecular beam epitaxy(MBE) method are the common methods of preparing VO2 thin films. The mechanism of each method and the research status at home and abroad are discussed, and the advantages and disadvantages of each method are compared clearly with a table in this paper, giving significant reference to the preparation of VO2 thin films under different conditions It also predicts the future research direction, paving a way for the further studies of the preparations and applications of VO2 thin film.
侯典心, 路远, 杨玚. VO2薄膜常见制备方法综述[J]. 红外技术, 2016, 38(12): 1020. HOU Dianxin, LU Yuan, YANG Yang. Review of the Common Preparation Methods of VO2 Thin Films[J]. Infrared Technology, 2016, 38(12): 1020.