针对我国惯性约束聚变装置(ICF)对高性能传输反射镜元件的性能要求, 探索了大口径传输反射镜制备涉及的关键技术与工艺。深入开展了K9玻璃坯片研制、光学冷加工、传输反射镜镀膜和激光预处理等方面的研究工作。提出了400 mm口径K9反射类坯片精密退火工艺, 形成了高精度平面加工技术路线;制备了低缺陷薄膜, 并且建立了大口径光学元件预处理装置。最后, 综述了大口径高性能传输反射镜研制方面的主要成果。研制的400 mm口径传输反射镜在1 053 nm处以45°入射时, 其表面粗糙度优于99.8%, 面形PV值小于λ/3 (λ=1 053 nm), 损伤阈值大于30 J/cm2(5 ns)。基于提出的技术研制的大口径传输反射镜已成功应用于我国神光系列高功率激光装置, 有力支撑了我国大型激光装置的稳定运行。

For the requirements of Inertial Confinement Fusion(ICF) facility for large aperture transport mirrors with higher performance, key technologies and special processing involved in mirror machining are explored. Some kinds of machining technologies, including the manufacturing of K9 glass blanks, optics cold processing, coating for transport mirrors and laser conditioning are investigated. The precision annealing process of 400 mm aperture K9 glass blank is proposed to implement the high precision optical finishing. Moreover, Low-defect coating is achieved. A preprocessing device for the larger aperture optical element is established and a laser conditioning platform for large aperture transport mirror is also realized. Finally, the paper reviews main achievements of development of large aperture transport mirrors. A 400 mm aperture transport mirror with an incidence angle of 45° shows its surface roughness to be higher than 99.8%, surface figure(PV value) lower than λ/3, and the laser-induced damage threshold higher than 30 J/cm2 (5 ns) at 1 053 nm. The large aperture transport mirrors have been successfully used in the higher power laser equipment of SG ICF facility, which supports the stable operation of the facility.