研究了径向偏振型飞秒脉冲激光并将其引入基于双光子吸收理论的微纳加工系统,得到了 更高纵向分辨率、更低长径比的二维微纳尺度聚合物结构。对聚焦光场内光强分布的理论模拟表 明:径向偏振型飞秒脉冲激光在提高纵向分辨率的同时会在一定程度上降低聚合物结构的横向分 辨率,使聚合物结构的长径比降低。用扫描电子显微镜表征聚合物结构得到的结果与理论模拟 结果具有良好的一致性。径向偏振型飞秒脉冲激光提高了微纳尺度聚合物结构的纵向 分辨率,在激光光刻领域有良好的应用前景。

The radially polarized femtosecond pulse laser is investigated and introduced into the micro/nano processing system which is based on two-photon absorption theory. The two-dimension micro/nano polymer structure with higher longitudinal resolution and lower aspect ratio is obtained. Theoretical simulation of intensity distribution within focal light field indicates that the radially polarized femtosecond pulse laser can reduce the lateral resolution of polymer structure to a certain extent while improving the longitudinal resolution, which reduces the aspect ratio of the polymer structure. The results obtained by characterizing the polymer structure with the scanning electron microscopy are in good agreement with the theoretical simulation results. The radially polarized femtosecond laser can improve the longitudinal resolution of micro/nano scale polymer structure. It has good application prospects in the field of laser lithography.