光学学报, 2017, 37 (2): 0206001, 网络出版: 2017-02-13   

面向海洋应用的光纤法布里-珀罗高压传感器 下载: 702次

Fiber-Optic Fabry-Perot High-Pressure Sensor for Marine Applications
作者单位
天津大学精密仪器与光电子工程学院光纤传感研究所光电信息技术教育部重点实验室, 天津 300072
摘要
研究了面向海洋应用的光纤法布里-珀罗高压传感器,通过建立有限元数值模型对传感器满量程腔长变化量进行分析。数值仿真显示,有限元模型的满量程腔长变化量处于固支模型和简支模型之间,且随着法布里-珀罗腔半径的减小和硅膜片厚度的增加而偏离固支模型。引入固支边界条件偏离度β对偏离程度进行量化分析。制作了三种不同规格的传感器进行压力实验研究。实验结果显示,实际测量得到的传感器芯片满量程腔长变化量与有限元数值计算的结果基本吻合,使用该有限元模型设计传感器芯片可将满量程腔长变化量误差降低到13.4%以下。传感器最大量程达到105 MPa,满量程测量精度均优于0.100%。
Abstract
We investigated a fiber-optic Fabry-Perot high-pressure sensor for marine applications, and established a finite element method (FEM) numerical model to analyze the full scale cavity length variation of the sensor. The numerical simulation results showed that the full scale cavity length variation in the FEM model was between the value of the clamped model and that of the simply supported model. With the decrease of the cavity radius and the increase of the silicon diaphragm thickness, the length variation of the FEM model deviated from that of the clamped model. We introduced clamped boundary condition deviation degree β to quantify the deviation degree. We produced three types of sensors and carried out pressure experiments. The experimental results showed that the full scale cavity length variations of sensor chip obtained by measurement and the FEM numerical calculation were generally coincident. The error of the full range cavity length variation was reduced to less than 13.4% when we designed the sensor chips with the FEM model. The maximum measurement range of the sensor was up to 105 MPa, and the measurement accuracy in the full scale was within 0.100%.

张伟航, 江俊峰, 王双, 刘琨, 张学智, 丁振扬, 刘铁根. 面向海洋应用的光纤法布里-珀罗高压传感器[J]. 光学学报, 2017, 37(2): 0206001. Zhang Weihang, Jiang Junfeng, Wang Shuang, Liu Kun, Zhang Xuezhi, Ding Zhenyang, Liu Tiegen. Fiber-Optic Fabry-Perot High-Pressure Sensor for Marine Applications[J]. Acta Optica Sinica, 2017, 37(2): 0206001.

本文已被 13 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!