Chinese Optics Letters, 2017, 15 (4): 043401, Published Online: Jul. 25, 2018
13.5 nm Schwarzschild microscope with high magnification and high resolution
340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 120.4640 Optical instruments 220.2740 Geometric optical design
Abstract
A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100 μm field of view (FOV) is designed and is working at 13.5 nm. Meanwhile, a CCD is used as a detector with a pixel size of 13 μm × 13 μm and imaging area of 13 mm × 13 mm . The imaging quality with tolerances of system and errors of mirrors are considered. We obtain that the best on-axes object resolution can be up to about 200 nm, the average value is 230 nm, and the resolution is about 360 nm at 80 μm FOV.
Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, Zhanshan Wang. 13.5 nm Schwarzschild microscope with high magnification and high resolution[J]. Chinese Optics Letters, 2017, 15(4): 043401.