提出了一种基于飞秒激光加工技术制作的微纳光纤高温压力传感器。用飞秒激光在光纤端面加工出法珀腔, 制作出的全光纤法珀干涉型压力传感器, 从室温到1100℃范围进行了压力温度试验。在不同温度下, 压力传感器都有良好的线性输出特性, 短时间工作温度超过1100℃, 能够满足高温环境下压力测量的需求。

A novel micro fiber optic high-temperature pressure sensor based on femtosecond laser processing technology is designed and manufactured. The sensor is a Fabry-Perot cavity which is manufactured on the end of the fiber end-face. The interferometric pressure sensor possesses high sensitivity, high resolution and can work under an extreme high temperature（as high as 1100℃）circumstance. The linear output property is achieved at different temperature. It is a promising sensor to measure the pressure in high temperature applications.