红外技术, 2017, 39 (2): 116, 网络出版: 2017-03-29
高温碲镉汞中波红外探测器的国内外进展
Review of HOT MW Infrared Detector Using MCT Technology
摘要
介绍了欧美发达国家在高工作温度碲镉汞中波红外探测器上的工艺技术路线及典型产品技术指标。对昆明物理研究所研制的基于标准 n-on-p(Hg空位掺杂)工艺的中波 640×512(15 .m)探测器进行了高工作温度性能测试, 测试结果显示器件性能基本达到国外产品的同期研制水平。
Abstract
Several kinds of technology roadmap process and technical specifications of typical product for HOT (high operating temperature) HgCdTe MW infrared detector from Euramerican developed countries are reviewed in this paper. A 640×512(15 .m) MW detector that was manufactured by Kunming Institute of Physics based on the standard n-on-p(Hg vacancy doped) process production output was selected for detailed HOT testing. The results prove that the performance of our detector basically reaches the level of foreign products developed in the same period.
周连军, 韩福忠, 白丕绩, 舒畅, 孙皓, 王晓娟, 李京辉, 邹鹏程, 郭建华, 王琼芳. 高温碲镉汞中波红外探测器的国内外进展[J]. 红外技术, 2017, 39(2): 116. ZHOU Lianjun, HAN Fuzhong, BAI Piji, SHU Chang, SUN Hao, WANG Xiaojuan, LI Jinghui, ZOU Pengcheng, GUO Jianhua, WANG Qiongfang. Review of HOT MW Infrared Detector Using MCT Technology[J]. Infrared Technology, 2017, 39(2): 116.