采用MOSFET半导体固态开关作为主放电开关取代气体开关、高压二极管替代充电电阻的技术方法,设计了一种基于功率MOSFET固态开关的纳秒级全固态脉冲源。设计的脉冲源主开关级数共5级,每级主开关分别由5只功率MOSFET半导体固态开关器件串联组成,开关通断控制采用脉冲隔离变压器同步驱动方式。在重复频率1 Hz~1 kHz、充电电压4 kV、负载阻抗为1 kΩ条件下,可实现输出幅度大于20 kV、前沿小于10 ns且脉宽大于100 ns的高压快脉冲。通过实验结果验证了所采用的设计原理及方法的可行性,并给出了单次和重复频率（1 kHz）触发信号作用下全固态脉冲源输出的实验结果。

This paper designs a all-solid-state pulse source with the output capability of repetition frequency and fast rise time, using MOSFET semiconductor switch instead of spark gap switch as primary discharge switch and power diode instead of charging resistor to reduce power dissipation. The pulse source has five stages, each stage includes 5 MOSFETs, which are triggered by a pulsed isolated transformer. Under repetition frequency 1 Hz-1 kHz, charge voltage 4-5 kV and load resistor 1 kΩ, the pulse source can output a high voltage pulse with amplitude more than 20 kV, rise time less than 10 ns, pulse width more than 100 ns. The paper gives the experimental results of output high voltage pulses with repetition frequency of 1Hz and 1 kHz, which verify the feasibility of design principle and method.