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Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

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Abstract

Accurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter.<录用日期>2017-03-30<上网时间>2017-04-20

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DOI:10.3788/col201715.071402

所属栏目:Lasers and laser optics

基金项目:This work was supported by the National Science and Technology Major Project (No. 2013ZX02202003), the National Key Research and Development Program (No. 2016YFB0402201), K. C. Wong Education Foundation, the Program of Shanghai Technology Research Leader (No. 17XD1424800), the Shanghai Sailing Program of Talented Youth in Science and Technology (No. 17YF1421200), the Key Technologies R&D Program of Jiangsu (Nos. BE2014001 and BE2016005-4), the Natural Science Foundation of Shanghai (Nos. 16ZR1440100 and 16ZR1440200), and the NSAF Foundation of National Natural Science Foundation of China (Nos. U1330134 and 61405202).

收稿日期:2016-12-05

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Zhijun Yuan:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaShanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
Haibo Zhang:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaShanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
Ren Ye:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaShanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
Jun Zhou:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaShanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
Yunrong Wei:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaShanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
Qihong Lou:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaShanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China

联系人作者:junzhousd@siom.ac.cn;

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引用该论文

Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chinese Optics Letters 15(7), 071402 (2017)

CrossRef返回数据

【1】V. K. Saini, P. Kumar, K. K. Sarangpani, S. K. Dixit, S. V. Nakhe. Development of a see-through hollow cathode discharge lamp for (Li/Ne) optogalvanic studies. Review of Scientific Instruments, 2017, 88(9): 093101 

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