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Micro-channel etching characteristics enhancement by femtosecond laser processing high-temperature lattice in fused silica glass

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Abstract

A fused silica glass micro-channel can be formed by chemical etching after femtosecond laser irradiation, and the successful etching probability is only 48%. In order to improve the micro-channel fabrication success probability, the method of processing a high-temperature lattice by a femtosecond laser pulse train is provided. With the same pulse energy and scanning speed, the success probability can be increased to 98% by optimizing pulse delay. The enhancement is mainly caused by the nanostructure, which changes from a periodic slabs structure to some intensive and loose pore structures. In this Letter, the optimum pulse energy distribution ratio to the etching is also investigated.<录用日期>2017-03-30<上网时间>2017-04-20

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DOI:10.3788/col201715.071403

所属栏目:Lasers and laser optics

基金项目:This work was partly supported by the National Natural Science Foundation of China (Nos. 51475482, 51475481, 51335011, and 91323301) and the Fundamental Research Funds for the Central Universities of Central South University.

收稿日期:2017-01-30

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Dongkai Chu:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Xiaoyan Sun:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Youwang Hu:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Xinran Dong:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Kai Yin:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Zhi Luo:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Jianying Zhou:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Cong Wang:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Ji'an Duan:The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China

联系人作者:huyw@csu.edu.cn;

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引用该论文

Dongkai Chu, Xiaoyan Sun, Youwang Hu, Xinran Dong, Kai Yin, Zhi Luo, Jianying Zhou, Cong Wang, Ji'an Duan, "Micro-channel etching characteristics enhancement by femtosecond laser processing high-temperature lattice in fused silica glass," Chinese Optics Letters 15(7), 071403 (2017)

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