基于快Marx发生器技术路线，研制了一套具有高功率密度的低阻抗紧凑型重频脉冲驱动源。采用18级Marx发生器电路结构，每级由1只60 nF/100 kV脉冲电容器、1个气体开关及隔离电感构成，每两级构成一个模块，整体采用SF6气体绝缘，储能密度达到25.7 kJ/m3; 采取开放式气体开关，其中两级为触发开关，其余为过电压自击穿开关; 触发源采用小型化Marx电路及绝缘胶真空灌封设计。实验中脉冲驱动源单次工作时在约18 Ω阻抗负载上输出电压达到765 kV、脉宽约160 ns、前沿约50 ns，功率密度达到157 GW/m3; 受充电电源功率限制，重复频率5 Hz充电70 kV，连续5脉冲输出功率约17 GW，脉冲波形重复性较好。

A compact repetitive pulsed power system on the basis of fast Marx generator was developed in order to realize pulsed power device miniaturization. It is mainly composed of fast Marx generator and trigger pulse supply. There are polypropylene film capacitors with plastic shell, miniaturized gas switches, isolated inductors and SF6 gas insulation in the 18-stage fast Marx generator, whose storage energy density is 25.7 kJ/m3. An 8-stage Marx generator circuit is utilized in trigger pulse supply with the maximal output voltage of 80 kV and pulse duration of about 500 ns. The compact pulsed power source integrated has a volume of about 0.2 m3. In single pulse operation mode, the voltage of output pulse on an 18 Ω resistor load is up to 765 kV with the pulse width (FWHM) of 162 ns, the rising time of 54 ns and the power density of 157 GW/m3. In repetitive mode with the rate of 5 Hz, the average peak voltage of 5 successive pulses is about 550 kV because of being limited by repetitive charging voltages. The pulsed power source can apply to biology, medical research and so on. This work can also provide experience for building a repetitive high pulsed power system with high performance.