Collection Of theses on high power laser and plasma physics, 2016, 14 (1): 0904002, Published Online: May. 26, 2017  

Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements

Author Affiliations
1 中国科学院上海光学精密机械研究所高功率激光物理国家实验室, 上海 201800
2 中国科学院大学, 北京 100049
Abstract
In order to investigate the response law of different interferometers to the mid-spatial frequency errors and obtain the relatively true power spectral density (PSD) distribution, the 4D AccuFiz, ZYGO DynaFiz and ZYGO GPI interferometers are respectively used to measure the periodic ripples and scratch samples, and the comparative analysis of the measured one-dimension PSD curves is made. The results show that the responsivities to the mid- and high-spatial frequency information are different for different interferometers, and the higher the interferometer resolution is, the higher the responsivity is. The instrument transfer function (ITF) curve is used to correct the measured PSD, and the truer PSD distribution is obtained. However, in the range of some frequency bands, there still exist some difference between the ITF curve and the practical response.

Yang Xianghui, Shen Weixing, Zhang Xuejie, Ma Xiaojun. Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements[J]. Collection Of theses on high power laser and plasma physics, 2016, 14(1): 0904002.

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