首页 > 论文 > 高功率激光及等离子体物理研究论文集(专题) > 12卷 > 1期(pp:926609--1)

Ray-tracing method to analyze and quantify the light enhancement around subsurface defects in transparent materials

Ray-tracing method to analyze and quantify the light enhancement around subsurface defects in transparent materials

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

Abstract

Laser-induced damage (LID) to optical glass has become a growing problem in high-power laser systems. It is well known that the main reason of glass being damaged is due to defects and impurities in the material. Damage caused by subsurface defects (SSDs) is especially common in actual system running. Accordingly, in the presence of SSDs, a simple and alternative calculation method is developed to evaluate the enhancement of light field around the incident and exit surface. This ray tracing approach, based on the classical optics theory, is very direct and clear to show the optical phenomena of light intensity enhancement. Some basic SSD shapes have been studied and investigated here, which reveals the importance and boundary condition of controlling the size and density of SSDs in grinding and polishing process. Finally, to achieve optimal breadth depth ratio, the least etching amounts by hydrofluoric (HF) acid is investigated. The theoretical analysis and simulation results provide an appropriate range of removal amounts, which is very important in the HF etching process.

广告组1.2 - 空间光调制器+DMD
补充资料

DOI:10.1117/12.2074559

所属栏目:元器件与工程工艺技术

基金项目:This work was supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 0205010405.2)

收稿日期:--

修改稿日期:--

网络出版日期:--

作者单位    点击查看

Rong Wu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China
Dongfeng Zhao:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, ChinaGraduate University of Chinese Academy of Science, Beijing 100049, China
Lei Zhang:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China
Ping Shao:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China
Neng Hua:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China
Zunqi Lin:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China

联系人作者:Rong Wu

【1】Feit M. D. and Rubenchik A. M., "Influence of subsurface cracks on laser induced surface damage," Proc. SPIE 5273, 264-271 (2004).

【2】Gao X., Feng G. Y., Han J. H. and Zhai L. L., "Investigation of laser-induced damage by various initiators on the subsurface of fused silica," Opt. Express 20, 22095-22101 (2012).

【3】Neauport J., Lamaignere L., Bercegol H., Pilon F. and Birolleau J. C., "Polishing-induced contamination of fused silica optics and laser induced damage density at 351 nm," Opt. Express 13, 10163-10171 (2005).

【4】Stevens-Kalceff M. A., Stesmans A. and Wong J., "Defects induced in fused silica by high fluence ultraviolet laser pulses at 355 nm," Appl. Phys. Lett. 80, 758-760 (2002).

【5】Liu H. J., Huang J., Wang F. R., Zhou X. D., Zhou X. Y., Sun L. X., Jiang X. D., Sui Z. and Zheng W. G., "Subsurface defects of fused silica optics and laser induced damage at 351 nm," Opt. Express 21, 12204-12217 (2013).

【6】Miller P. E., Suratwala T. I., Wong L. L., Feit M. D., Menapace J. A., Davis P. J. and Steele R. A., "The Distribution of Subsurface Damage in Fused Silica," Proc. SPIE 5991, 599101+25 (2005).

【7】Windecker R., Franz S. and Tiziani H. J., "Optical Roughness Measurements with Fringe Projection," Appl. Opt. 38, 2837-2842 (1999).

【8】Werne T., Testorf M. and Gibson U., "Local-field enhancement in metal-dielectric nanocylinders with complex cross sections," J. Opt. Soc. Am. A 23, 2299-2306 (2006).

【9】Li L., Xiang X., Zu X. T., Wang H. J., Yuan X. D., Jiang X. D., Zheng W. G. and Dai W., "Numerical simulation of the modulation to incident laser by the repaired damage site in a fused silica subsurface," Chin. Phys. B 20, 074209+5 (2011).

【10】Bloembergen N., "Role of Cracks, Pores, and Absorbing Inclusions on Laser Induced Damage Threshold at Surfaces of Transparent Dielectrics," Appl. Opt. 12, 661-664 (1973).

【11】Jacobs S., Golini D., Hsu Y., Puchebner E., et al., "Magnetorheological Finishing: A Deterministic Process for Optics Manufacturing, " Proc. SPIE 2576, 372-382 (1995).

【12】Génin F. Y., Salleo A., Pistor T. V. and Chase L. L., "Role of light intensification by cracks in optical breakdown on surfaces," J. Opt. Soc. Am. A 18, 2607-2616 (2001).

【13】Li L., Xiang X., Yuan X. D., He S. B., Jiang X. D., Zheng W. G. and Zu X. T., "Effect of fused silica subsurface defect site density on light intensification," Chin. Phys. B 22, 054207+5 (2013).

【14】Hua J. R., Li L., Xiang X. and Zu X. T., "Three-dimensional numerical simulation of light field modulation in the vicinity of inclusions in silica subsurface," Acta. Phys. Sin. 60, 044206+5 (2011).

【15】Zhang C. L., Wang Z. G., Xiang X., Liu C. M., Li L., Yuan X. D., He S. B. and Zu X. T., "Simulation of field intensification induced by pit-shaped crack on fused silica rear-surface," Acta. Phys. Sin. 61, 114210+8 (2012).

【16】Stuart B. C., Feit M. D., Herman S., Rubenchik A. M., Shore B. W. and Perry M. D., "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).

【17】Suratwala T. I., et al., "HF-based etching processes for improving laser damage resistance of fused silica optical surfaces," J. Am. Cer. Soc. 94, 416-428 (2011).

【18】Feit M. D., Suratwala T. I., Wong L. L., Steele W. A., Miller P. E. and Bude J. D., "Modeling wet chemical Etching of surface flaws on fused silica," Proc. SPIE 7504, 75040L1+12 (2009).

【19】Jiang Y, Xiang X, Yuan X D, Liu C M, Wang H J, Luo C S, He S B, Lv H B, Zheng W G and Zu X T, "Characterization of 355nm laser-induced damage of mitigated damage sites in fused silica," Laser Phys. 23, 026001+7 (2013).

【20】Miller P. E., Bude J. D., Suratwala T. I., Shen N., Laurence T. A., Steele W. A., Menapace J., Feit M. D. and Wong L. L., "Fracture-induced subbandgap absorption as a precursor to optical damage on fused silica surfaces," Opt. Lett. 35, 2702-2704 (2010).

【21】Chen M, Xiang X, Jiang Y, Zu X T, Yuan X D, Zheng W G, Wang H J, Li X B, Lv H B, Jiang X D and Wang C C, "Enhancement of laser induced damage threshold of fused silica by acid etching combined with UV laser conditioning," High Power Laser and Particle Beams 22, 1383-1387 (2012).

【22】Wyrowski F. and Kuhn M., "Introduction to field tracing," J. Mod. Optics 58, 449-466 (2011).

【23】Swanson G. J., "Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive optical elements," MIT Tech. Rep. 914, 1-27 (1991).

【24】Wang H. J., Kuang D. F. and Fang Z. L., "Diffraction analysis of blazed transmission gratings with a modified extended scalar theory," J. Opt. Soc. Am. A 25, 1253-1259 (2008).

【25】Lambropoulos J. C., "From abrasive size to subsurface damage in grinding," Optical Fabrication and Testing OSA Technical Digest 17, 1 (2000).

【26】Araujo M. P., Carvalho S. A. and Leo S. D., "The asymmetric goos-hanchen effect," J. Opt. 16, 015702+7 (2013).

引用该论文

Rong Wu,Dongfeng Zhao,Lei Zhang,Ping Shao,Neng Hua,Zunqi Lin. Ray-tracing method to analyze and quantify the light enhancement around subsurface defects in transparent materials[J]. Collection Of theses on high power laser and plasma physics, 2014, 12(1): 926609

Rong Wu,Dongfeng Zhao,Lei Zhang,Ping Shao,Neng Hua,Zunqi Lin. Ray-tracing method to analyze and quantify the light enhancement around subsurface defects in transparent materials[J]. 高功率激光及等离子体物理研究论文集(专题), 2014, 12(1): 926609

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF