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Single shot ptychographical iterative engine based on multi-beam illumination

Single shot ptychographical iterative engine based on multi-beam illumination

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摘要

An optical alignment and a corresponding reconstruction algorithm are proposed to realize a single shot Ptychographical Iterative Engine (PIE). Multiple light beams generated by a cross grating are used to illuminate the specimen, and the resulting diffraction patterns formed on the detector plane by each beam are recorded simultaneously. The modulus and phase images are properly reconstructed with standard PIE algorithm. The proposed single shot method omits the needs for a mechanical x-y scanning of standard PIE algorithm and hence dramatically reduces the data acquisition time.

Abstract

An optical alignment and a corresponding reconstruction algorithm are proposed to realize a single shot Ptychographical Iterative Engine (PIE). Multiple light beams generated by a cross grating are used to illuminate the specimen, and the resulting diffraction patterns formed on the detector plane by each beam are recorded simultaneously. The modulus and phase images are properly reconstructed with standard PIE algorithm. The proposed single shot method omits the needs for a mechanical x-y scanning of standard PIE algorithm and hence dramatically reduces the data acquisition time.

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DOI:10.1063/1.4826273

所属栏目:元器件与工程工艺技术

基金项目:This work was supported by the One Hundred Talents Project of the Chinese Academy of Sciences, Grant No. 1104331-JR0.

收稿日期:2013-05-15

修改稿日期:2013-10-06

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作者单位    点击查看

Xingchen Pan:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Cheng Liu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Jianqiang Zhu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

联系人作者:Cheng Liu(cheng.liu@hotmail.co.uk)

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引用该论文

Xingchen Pan,Cheng Liu,Jianqiang Zhu. Single shot ptychographical iterative engine based on multi-beam illumination[J]. Collection Of theses on high power laser and plasma physics, 2013, 11(1): 171105

Xingchen Pan,Cheng Liu,Jianqiang Zhu. Single shot ptychographical iterative engine based on multi-beam illumination[J]. 高功率激光及等离子体物理研究论文集(专题), 2013, 11(1): 171105

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