首页 > 论文 > 高功率激光及等离子体物理研究论文集(专题) > 11卷 > 1期(pp:6162-6168)

Ptycholographic iterative engine with self-positioned

Ptycholographic iterative engine with self-positioned

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

A special optical alignment is adopted and corresponding reconstruction algorithm is developed to reduce the reconstruction error induced by the hysteresis or backlash error of the translation stage in Ptychographical Iterative Engine (PIE) imaging with weak scattering specimen. In this suggested method, the positions of the scanning probe are determined directly from the recorded diffraction patterns rather than from the readout of the stage meter. This method not only remarkably improves the reconstruction quality, but also completely lowers the dependency of PIE on the device accuracy and accordingly enhances its feasibility for many applications with weak scattering specimen.scanning illumination

Abstract

A special optical alignment is adopted and corresponding reconstruction algorithm is developed to reduce the reconstruction error induced by the hysteresis or backlash error of the translation stage in Ptychographical Iterative Engine (PIE) imaging with weak scattering specimen. In this suggested method, the positions of the scanning probe are determined directly from the recorded diffraction patterns rather than from the readout of the stage meter. This method not only remarkably improves the reconstruction quality, but also completely lowers the dependency of PIE on the device accuracy and accordingly enhances its feasibility for many applications with weak scattering specimen.

Newport宣传-MKS新实验室计划
补充资料

所属栏目:元器件与工程工艺技术

基金项目:This research is supported by the One Hundred Persons Project of Chinese Academy of Sciences.

收稿日期:2013-01-10

修改稿日期:2013-02-09

网络出版日期:--

作者单位    点击查看

Xinchen Pan:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Cheng Liu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Qiang Lin:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Jianqiang Zhu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

联系人作者:Cheng Liu(cheng.liu@hotmail.co.uk)

【1】J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys. 150, 87–184 (2008).

【2】M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun. 3, 730 (2012), doi:10.1038/ncomms1733.

【3】H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett. 93(2), 023903 (2004).

【4】C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy 109(10), 1263–1275 (2009).

【5】A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett. 35(15), 2585–2587 (2010).

【6】S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng. 16(1), 49–55 (1994).

【7】C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum. 76(9), 095111 (2005).

【8】A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009).

【9】J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett. 85(20), 4795–4797 (2004).

【10】F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B 82(12), 121415 (2010).

【11】J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt. 21(15), 2758–2769 (1982).

【12】J. R. Fienup and C. C. Wackerman, “Phase retrieval stagnation problems and solutions,” J. Opt. Soc. Am. A 3(11), 1897–1907 (1986).

【13】B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys. 4(5), 394–398 (2008).

【14】J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy 101(2-4), 149–152 (2004).

【15】M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature 483(7390), 444–447 (2012).

引用该论文

Xinchen Pan,Cheng Liu,Qiang Lin,Jianqiang Zhu. Ptycholographic iterative engine with self-positioned[J]. Collection Of theses on high power laser and plasma physics, 2013, 11(1): 6162-6168

Xinchen Pan,Cheng Liu,Qiang Lin,Jianqiang Zhu. Ptycholographic iterative engine with self-positioned[J]. 高功率激光及等离子体物理研究论文集(专题), 2013, 11(1): 6162-6168

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF