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氧化锌薄膜的准分子激光退火热效应模拟分析

Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films

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摘要

基于热传导方程建立了ZnO薄膜的准分子激光辐照理论模型,模拟分析了KrF准分子激光辐照ZnO薄膜的热效应。计算了薄膜的温度场分布和热流分布,讨论了激光作用过程中的温度随时间的变化关系,分析了激光能量密度对薄膜温度场的影响。模拟结果表明,ZnO薄膜的准分子激光退火具有急热骤冷特性,ZnO薄膜表面温度与激光能量密度呈线性增长关系,表面热熔融阈值为261 mJ/cm2。

Abstract

Based on the heat conduction equation, a theoretical model related to the excimer laser irradiation of ZnO thin films is built. The thermal effect in the KrF excimer laser irradiation of ZnO thin films is simulated and analyzed. The distributions of temperature field and thermal flux of the films are calculated. The variation relationship between temperature and time during the laser action process is discussed. The influence of the laser energy density on the temperature field of the films is analyzed. The simulation results show that the excimer laser annealing process of ZnO thin films has the heat quench characteristic, the surface temperature of ZnO thin films increases linearly with the laser energy density, and the thermal melting threshold of film surfaces is 261 mJ/cm2.

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中图分类号:TN249

DOI:10.3788/lop54.061401

所属栏目:激光器与激光光学

基金项目:脉冲功率激光技术国家重点实验室开放研究基金项目(SKL2014KF03)

收稿日期:2017-01-17

修改稿日期:2017-01-23

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邵景珍:中国科学院安徽光学精密机械研究所安徽省光子器件与材料重点实验室, 安徽 合肥 230031
王 玺:电子工程学院脉冲功率激光技术国家重点实验室, 安徽 合肥 230037
胡红涛:中国科学院安徽光学精密机械研究所安徽省光子器件与材料重点实验室, 安徽 合肥 230031
方晓东:中国科学院安徽光学精密机械研究所安徽省光子器件与材料重点实验室, 安徽 合肥 230031

联系人作者:邵景珍(jzshao@aiofm.ac.cn)

备注:邵景珍(1979-),女,博士,副研究员,主要从事紫外激光与材料相互作用方面的研究。

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引用该论文

Shao Jingzhen,Wang Xi,Hu Hongtao,Fang Xiaodong. Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films[J]. Laser & Optoelectronics Progress, 2017, 54(6): 061401

邵景珍,王 玺,胡红涛,方晓东. 氧化锌薄膜的准分子激光退火热效应模拟分析[J]. 激光与光电子学进展, 2017, 54(6): 061401

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