中国激光, 2017, 44 (6): 0603001, 网络出版: 2017-06-08
非破坏性玻璃亚表面缺陷定量检测新方法
New Method for Non-Destructive Quantitative Measurement of Subsurface Damage Within Glasses
材料 频域光学相干层析成像术 玻璃亚表面缺陷 非破坏性检测 定量检测 materials spectral domain optical coherence tomography subsurface damage within glasses non-destructive measurements quantitative measurements
摘要
提出了一种基于频域光学相干层析成像(SDOCT)技术的非破坏性玻璃亚表面缺陷(SSDs)定量检测新方法,描述了所搭建SDOCT系统的成像原理和特性, 给出了所重建的玻璃SSDs二维和三维图像。利用所获得的图像, 可以定量获得玻璃SSDs的深度、尺寸和形状。该研究结果对光学零件的加工和应用具有重要意义。
Abstract
A new method for the non-destructive quantitative measurement of subsurface damages (SSDs) within glass samples is proposed based on the spectral-domain optical coherence tomography (SDOCT) technology. The imaging principle and characteristics of the built SDOCT system are illustrated. The reconstructed two- and three-dimensional images of glass SSDs are given, from which the depths, sizes and shapes of glass SSDs can be obtained quantitatively. These results have significant importance for the manufacture and the applications of optical components.
伍秀玭, 高万荣, 张运旭, 何勇. 非破坏性玻璃亚表面缺陷定量检测新方法[J]. 中国激光, 2017, 44(6): 0603001. Wu Xiupin, Gao Wanrong, Zhang Yunxu, He Yong. New Method for Non-Destructive Quantitative Measurement of Subsurface Damage Within Glasses[J]. Chinese Journal of Lasers, 2017, 44(6): 0603001.