光电技术应用, 2017, 32 (2): 21, 网络出版: 2017-06-08
大功率半导体激光器防反射光损伤技术研究
Research on Anti-reflective Laser Damage Technology of High Power Diode Laser
大功率半导体激光器 防反射光损伤 主被动结合 high power diode laser anti-reflective laser damage combination of active and passive
摘要
反射光损伤影响了大功率半导体激光器在工业加工中的进一步应用, 为了解决大功率半导体激光器工业应用中遇到的问题, 对大功率半导体激光器防反射光损伤技术的研究具有重要意义。利用半导体激光线偏振光的特性, 采用偏振分光镜和λ/4波片的组合装置, 实现大功率半导体激光器的主动防反射光损伤; 结合利用光电监测单元对反射光强度进行监测, 反射光强度高于损伤阈值时, 关闭激光输出, 实现被动防反射光损伤, 研制出了既具有主动防反射光损伤功能又具有被动防反射光损伤功能的防反射光损伤装置, 可应用于工业加工用的大功率半导体激光器中。
Abstract
The reflected laser damage has affected the further application of high power diode lasers in industry processing. It is very important to the research on the problem of reflected laser damage technology for solving the problem of the high power diode lasers in industrial application. The active anti-reflective laser damage of the high power diode lasers is realized based on the line polarized laser characteristic of diode laser and using the combination device of polarized beam splitter and λ/4 wave plate. The reflective laser intensity is monitored by the electro-optic monitoring unit. When the reflective laser intensity is higher than the damage threshold, the laser output is closed to realize the passive anti-reflective laser damage. The anti-reflective laser damage device with both active and passive anti-reflective laser damage functions is researched which can be used in the high power diode laser of industrial processing.
李庆轩, 杨旭, 秦文斌. 大功率半导体激光器防反射光损伤技术研究[J]. 光电技术应用, 2017, 32(2): 21. LI Qing-xuan, YANG Xu, QIN Wen-bin. Research on Anti-reflective Laser Damage Technology of High Power Diode Laser[J]. Electro-Optic Technology Application, 2017, 32(2): 21.