采用显微激光诱导击穿光谱技术对低合金钢标准样品进行定量分析, 空间分辨率达到20 μm, 单脉冲检测极限(LoD)为0.10%。 根据谱线强度和元素浓度的关系获得Mn元素的基本定标曲线, 定标曲线的拟合度系数R2为0.97, 采用去一交互验证法预测了样品中Mn元素的浓度, 七个样品的平均预测误差为12.91%, 去一交互验证均方根误差为0.11%。 采用内标法时定标曲线的拟合度系数R2为0.99, 七个样品的平均预测误差为7.25%, 去一交互验证均方根误差为0.07%。 实验结果表明显微激光诱导击穿光谱技术能有效应用于物质微区元素的高精度定性、 定量分析。

Manganese in the low alloy steel was analyzed quantitatively using micro-laser-induced breakdown spectroscopy. The spatial resolution of 20 μm and the single pulse limit of detection of 0.10% were obtained. The calibration curve of Mn was established with basic calibration method, with determination coefficient (R2) of 0.97. The average relative error of Mn concentration prediction on 7 samples is 12.91%, and the root-mean-square error of cross-validation (RMSECV) is 0.11%. The R2 reaches 0.99 when using internal calibration method, as well as the average relative error of Mn concentration prediction on 7 samples and RMSECV were decreased to 7.25% and 0.07%, respectively. These results show that MicroLIBS technique is an effective approach for material surfaces quantitative microanalysis.