利用脉冲激光沉积(PLD)设备在蓝宝石衬底上制备了高质量Zn1-xMgxO单晶薄膜, 并对其结构和光学特性进行了深入细致的研究。通过能量衍射谱(EDS)确认Zn1-xMgxO薄膜的Mg组分为45％。在Zn0.55Mg0.45O薄膜的X射线衍射谱(XRD)中观测到了明显的位于36.67°的衍射峰, 对应的是(111)晶向的立方相ZnMgO。从透射光谱中可以看出, Zn0.55Mg0.45O具有陡峭的吸收边, 没有发生相分离, 在透射电镜图谱中也得到了证实。该ZnMgO薄膜还表现出了优异的光学特性, 在Zn0.55Mg0.45O材料体系中实现了峰位位于310 nm的紫外光泵浦受激发射, 其激光发射的阈值仅为22 kW/cm2。

The optical and structural properties of high-quality epitaxial Zn1-xMgxO films deposited by pulsed-laser deposition (PLD) were studied. Zn1-xMgxO films with ~45% Mg incorporation were measured by EDS (Energy dispersive spectroscopy). XRD (X-ray diffraction) measurement results show that Zn0.55Mg0.45O films have a cubic phase structure without phase separation and are epitaxial grown along the c-axis of Al2O3 substrate. In the films, intense UVB optical pumped stimulated emission of this pure cubic-phase ZnMgO can be observed. The lasing threshold is about 22 kW/cm2. Lasing occurs at UVB wavelength of ~310 nm under optical pumping.