Chinese Optics Letters, 2017, 15 (10): 101201, Published Online: Jul. 19, 2018  

Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer Download: 856次

Author Affiliations
1 State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
2 Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing 100084, China
Abstract
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase-modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.

Ming Zhang, Chang Ni, Yu Zhu, Leijie Wang, Chuxiong Hu, Jinchun Hu. Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer[J]. Chinese Optics Letters, 2017, 15(10): 101201.

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