针对太赫兹波段高通滤波器, 介绍了利用光刻工艺在镀有铝层的聚对苯二甲酸乙二醇酯薄膜上进行亚波长结构样品的实验室制备过程, 主要研究了亚波长矩形金属孔阵列结构对太赫兹波透射特性的影响, 并利用仿真软件对这种结构的高通滤波特性进行了理论分析。对矩形孔结构中孔的大小和金属线宽对高通滤波效果的影响做了数值分析, 并建立了相应的数学模型。

For high pass filter in terahertz frequency range, a laboratory preparation process of subwavelength structure sample on polyethylene terephthalate film coated with aluminum layer using photolithography process is described. The influence of subwavelength rectangular metal hole array structure on the transmission properties of terahertz wave is mainly studied, and the high-pass filter characteristics of this structure are analyzed theoretically by using simulation software. The influence of hole size and metal line width of the rectangular hole structure on the high-pass filtering effect is numerically analyzed, and the corresponding mathematical model is established.