恒弹性合金因其在一定温度范围内弹性模量几乎不随温度变化的特点, 在精密仪器仪表等制造领域应用越来越广泛, 其表面加工的要求也越来越高。为研究飞秒激光在不同加工环境下对恒弹性合金的烧蚀情况, 对比了两种加工条件不同的烧蚀实验。空气环境中; 用150 μm薄玻璃片压贴在样品表面, 烧蚀方式分为定点烧蚀和刻槽两种, 用共聚焦显微镜和扫描电镜测量了烧蚀后的恒弹合金形貌。结果表明, 采用定点烧蚀的加工方式时, 相同激光参数下, 空气中烧蚀坑的直径最小, 深度最大; 玻璃片约束下的坑的直径最大, 深度最小, 当激光能量为50 μJ, 脉冲数为100个时, 该约束下烧蚀坑的深度缩减量可达44.0%。采用刻槽的加工方式时, 在空气中的槽的深度大, 宽度较大, 在玻璃片的约束下, 加工的槽的深度和宽度都减小, 当激光能量为50 μJ、扫描速度为1.5 mm/s时, 其深度缩减量可达47.2%。

Constant elastic alloy due to the elastic modulus in a certain temperature range hardly change with temperature characteristics, in the field of precision instruments and other manufacturing applications more and more widely, the surface processing requirements are also getting higher and higher. In order to study the femtosecond laser ablation with constant elastic alloy under different processing environment, this paper compares the ablation experiments in two different processing conditions: in the air environment; 150 μm thin glass sheet is pressed on the surface of the sample. Ablative method is divided into fixed point ablation and groove. The morphology of constant elastic alloy after ablation was measured by confocal microscopy and scanning electron microscopy. The results show that using fixed point ablation processing method, under the same laser parameters, the diameter of the pits under the air is the smallest and the depth is the biggest; the diameter of the pits under the glass sheet is the biggest and the depth is the smallest. When the laser energy is 50 μJ and the number of pulses is 100, the depth reduction of the ablation pits can reach 44.0%. When using groove processing method, the depth of the groove in the air is large and the width is larger, and the depth and width of the groove are reduced under the constraint of the glass sheet. When the laser energy is 50 μJ and the scanning speed is 1.5 mm / s, the depth reduction can reach 47.2%.