利用波长为248 nm的氟化氪(KrF)准分子激光器加工了掺镧锆钛酸铅压电陶瓷(PZT)、硅(Si)和聚二甲基硅氧烷(PDMS), 研究了准分子激光对这3种材料的加工效果。为了解决传统切割工艺加工PZT膜片时易发生破裂的问题, 研究了准分子激光加工PZT微结构的性能。通过调整准分子激光器的激光脉冲能量、脉冲频率、扫描速度及扫描次数等参数, 获得了加工参数及其与PZT沟槽加工深度和宽度的关系。研究了辅助气体对准分子激光加工PZT表面粗糙度的影响。用准分子激光器制备了基于PZT-Si复合材料的微悬臂梁和微膜片, 并测试了其压电性能。结果表明, 利用准分子激光器加工的2种PZT微压电结构具有良好的压电性能, 可作为微压电驱动器的关键器件, 验证了用准分子激光器加工PZT微结构的可行性。

Plumbum (Pb)-based lanthanum doped zirconate titante piezoelectric ceramic (PZT), silicon (Si) and polydimethylsiloxane (PDMS) are fabricated with 248 nm KrF excimer laser. The processing effects of excimer laser on the above three materials are investigated. To solve the problem that the PZT diaphragm fabricated with traditional dicing process is fragile, the processing performance of PZT microstructure with excimer laser is investigated. The processing parameters and the relationship among processing parameters, processing depth and processing width of PZT substrate are obtained when we adjust several parameters of excimer laser, such as laser pulse energy, pulse frequency, scanning speed and scanning times. Effects of auxiliary gas on the PZT surface roughness processed with excimer laser are studied. The PZT-Si cantilever and PZT-Si diaphragm are fabricated with excimer laser, and their piezoelectric properties are tested. Results show that the two PZT micro-piezoelectric structures fabricated by excimer laser have excellent piezoelectric performance, and the structures can be used as key devices of micro-piezoelectric actuator. The feasibility of processing PZT microstructure with excimer laser is proved.