中国激光, 2017, 44 (9): 0904001, 网络出版: 2017-09-07  

光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法 下载: 948次

Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront
作者单位
1 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033
2 中国科学院大学, 北京 100049
摘要
衍射波前质量是衡量刻划光栅性能的重要指标之一, 光栅刻划机若存在阿贝误差, 将直接影响刻线位置精度, 从而影响光栅的波前质量。建立了刻划机阿贝误差与光栅衍射波前质量的物理模型, 并分析了该误差对波前质量的影响。针对该误差设计了一种基于双频激光干涉测量的阿贝误差测量光路, 测量了刻划机的阿贝误差, 根据物理模型对其导致的光栅衍射波前误差作了仿真分析, 并提出了基于双层工作台结构的误差控制校正方法。对两块尺寸为80 mm×100 mm、刻线密度为79 groove/mm的中阶梯光栅进行了阿贝误差校正前后的对比刻划实验。结果表明, 通过对阿贝误差的测量和校正, 光栅闪耀级次为-36级的衍射波前误差由0.529λ降低至0.159λ(λ=632.8 nm), 有效地降低了阿贝误差对光栅衍射波前质量的影响。
Abstract
Diffracted wavefront quality is one of the important performance indexes of gratings. If there is Abbe error in the grating ruling engine, it will directly affect the positioning accuracy of grooves, thus affecting wavefront quality of gratings. The physical models of the Abbe error and the quality of the grating diffraction wave are established, to analyze the influence of the error on the wavefront quality. Aiming at the Abbe error, a kind of measurement optical path is designed based on dual-frequency laser interferometry, and the influence of Abbe error on diffracted wavefront of the grating is measured and simulated. Furthermore, the error control method based on double-layer grating table structure is proposed. Before and after revising Abbe error, the ruling experiments for two echelle gratings with the size of 80 mm×100 mm and groove density of 79 groove/mm are carried out. The results show that the diffracted wavefront error of the gratings in -36 blaze order is reduced from 0.529λ to 0.159λ (λ=632.8 nm) by the measurement and correction of the Abbe error, which effectively reduces the influence of Abbe error on the quality of grating′s diffracted wavefront.

糜小涛, 于海利, 于宏柱, 齐向东, 李晓天, 万秋华. 光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法[J]. 中国激光, 2017, 44(9): 0904001. Mi Xiaotao, Yu Haili, Yu Hongzhu, Qi Xiangdong, Li Xiaotian, Wan Qiuhua. Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront[J]. Chinese Journal of Lasers, 2017, 44(9): 0904001.

引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!