光学学报, 2017, 37 (9): 0913001, 网络出版: 2018-09-07
基于多齿谐振光栅的偏振无关宽带反射镜的研究 下载: 820次
Study on Polarization Independent Broadband Reflector Based on Multi-Subpart Profile Resonant Grating
集成光学 偏振无关反射镜 亚波长结构 多齿光栅 integrated optics polarization independent reflector subwavelength structure multi-subpart profile grating
摘要
主要探讨了一种基于多层多齿谐振光栅结构的高性能偏振无关反射镜。得益于TE和TM偏振光泄漏模谐振的共存及相互作用,该器件在1.65~1.72 μm较宽的频谱范围内具有反射率大于97%、角度带宽约为24.6°、插入损耗小于0.25 dB、偏振相关损耗小于0.18 dB的优越性能。通过严格耦合波分析方法验证了此器件在现有工艺误差范围内具有较好的工艺容差性。
Abstract
A high-performance polarization independent reflector based on a multilayered grating structure with multi-subpart profile is discussed. Owing to the advantages of co-existence and interaction of TE polarization light and TM polarization light leaky modes, the proposed reflector can offer combined merits of high reflectivity (over 97%), wide angular bandwidth (about 24.6°), low insertion loss (below 0.25 dB) and low polarization dependent loss (below 0.18 dB) over a broadband spectrum of 1.65-1.72 μm. The rigorous coupled wave analysis method is used to verify the good process tolerance of the reflector in the existing process error range.
吴华明, 肖永生, 黄丽贞, 肖文波, 段军红, 徐欢欢, 马林飞, 刘宪爽. 基于多齿谐振光栅的偏振无关宽带反射镜的研究[J]. 光学学报, 2017, 37(9): 0913001. Huaming Wu, Yongsheng Xiao, Lizhen Huang, Wenbo Xiao, Junhong Duan, Huanhuan Xu, Linfei Ma, Xianshuang Liu. Study on Polarization Independent Broadband Reflector Based on Multi-Subpart Profile Resonant Grating[J]. Acta Optica Sinica, 2017, 37(9): 0913001.