压电喷墨打印是制备印刷电子器件的主要手段之一, 其墨滴喷射状态直接受压电波形的影响, 因而压电波形对于器件打印具有重要意义。本文主要研究了压电波形对薄膜晶体管(TFT)电极打印效果的影响, 实验通过改变压电波形的加压速率和脉冲持续时间, 打印得到了一系列的电极样品, 并对其图形效果及表面粗糙度进行了测量。实验表明, 随着加压速率和脉冲持续时间的增大, 墨滴喷出动能增大, 最终打印的图形效果先改善后恶化, 表面粗糙度则随之增大。在加压速率取值为0.08～1.65 V/μs、脉冲持续时间取值为1.216～2.688 μs的区间内得到了失真程度较小的电极图形, 在加压速率及脉冲持续时间分别为0.25 V/μs、2.688 μs及0.65 V/μs、1.600 μs时, 电极图形化效果较好, 表面粗糙度分别为59.04 nm和59.27 nm。通过对压电波形参数的合理设置, 能够实现对打印图形效果的优化。

Piezoelectric printing is one of the main processes of printed electronics. In this process, piezoelectric waveform has a direct impact on the spray regime of ink droplets, which will play an important role in the devices printing. In this text, effect of piezoelectric waveform on printing thin film transistor(TFT) electrode was studied. By changing slew rate and duration, the piezoelectric waveform parameters, a series of printing samples were obtained, and their patterning quality and surface roughness were measured. With the increasing of the slew rate and duration, the kinetic energy of the ink droplet increases, the patterning quality improves first and then deteriorates, and the surface roughness of final printing pattern gets higher. TFT electrodes with fine pattern are fabricated when the slew rate is from 0.08 V/μs to 1.65 V/μs, and the duration is from 1.216 μs to 2.688 μs. Fine-patterned TFT electrodes with surface roughness of 59.04 nm and 59.27 nm are fabricated when the slew rate and duration are 0.25 V/μs, 2.688 μs and 0.65 V/μs, 1.600 μs, respectively. By adjusting the parameters of piezoelectric waveform, the optimization of printing quality can be achieved.