光学学报, 2017, 37 (10): 1031001, 网络出版: 2018-09-07
离子束溅射薄膜光学常数表征的光斑效应 下载: 740次
Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering
摘要
利用离子束溅射沉积制备了光学薄膜。基于椭圆偏振测量技术,研究了折射率、膜层厚度和表面层厚度与测试光斑大小的关系。研究结果表明,随着样品表面测试光斑尺寸的增加,薄膜折射率变小,膜层厚度、表面层厚度增加。使用反射光谱法和轮廓仪分别验证了各光学常数的光斑效应。研究结果表明,光学薄膜的折射率与膜层厚度具有弱横向非均匀性,采用大尺寸测量光斑能弱化这种非均匀性。
Abstract
Optical films are prepared by using ion beam sputtering deposition. Basing on the spectroscopic ellipsometry measurement technique, the relationship between refractive index, film layer thickness, surface layer thickness and spot size is studied. The study results show that, with the increase of tested spot size on the sample surface, the refractive index of thin films decreases, while the film layer thickness and surface layer thickness increase. The spot effects of optical constants are verified by using the reflectance spectrophotometry and the profilometer, respectively. The study results show that the refractive index and the film layer thickness have weak transverse inhomogeneity, which can be weakened by the usage of large-size tested spots.
刘华松, 杨霄, 刘丹丹, 姜承慧, 李士达, 季一勤, 张锋, 王利栓, 姜玉刚, 陈德应. 离子束溅射薄膜光学常数表征的光斑效应[J]. 光学学报, 2017, 37(10): 1031001. Huasong Liu, Xiao Yang, Dandan Liu, Chenghui Jiang, Shida Li, Yiqin Ji, Feng Zhang, Lishuan Wang, Yugang Jiang, Deying Chen. Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering[J]. Acta Optica Sinica, 2017, 37(10): 1031001.