光电子快报(英文版), 2016, 12 (4): 241, Published Online: Oct. 12, 2017  

Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

Author Affiliations
Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province, Colleges of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China
Abstract
A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane (PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate (PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.

GUO Hui-jing, ZHANG Xiao-liang, LI Xiao-chun. Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint[J]. 光电子快报(英文版), 2016, 12(4): 241.

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