针对目前国内尚无自主知识产权的半导体分选机系统的状况,提出了一种基于PLC的智能分选机系统的设计方案。智能分选机系统以工控 机为上位机、安川MP2310为下位机,通过伺服驱动器控制伺服电机构成闭环控制系统,实现了精确的位置控制,能够满足半导体芯片 分选的精度要求。给出了分选机系统上料部分程序设计的流程图,详细介绍了上料部分的工艺流程,给出了部分上料部分典型 PLC程序,解决了工作台示教、芯片快速分选等问题。现场使用表明,该系统设计合理,工作可靠稳定。

As there is no independent intellectual property rights for domestic semiconductor sorter system now, a program for designing an intelligent sorting machine control system based on PLC was put forward. The intelligent sorting machine system which puts IPC as the host computer, Yaskawa MP2310 as slave, constitutes closed loop control system through servo driver which controls the servo motor. It not only achieves accurate position control but also meets the accuracy requirements of the semiconductor chip that is sorted. First of all, a flow chart about the loader part was presented, then the process about the loader part was introduced in detail, and some typical PLC program of loader part was given. The most important is that the problems of teaching the table, fast sorting chips were resolved. The system is reasonable, reliable, stable in actual use.