本文设计了一种由压电陶瓷驱动的应变片进行检测的平面三自由度纳米定位平台, 该平台采用的是平板铰链、直圆铰链及单边V型铰链导向的3-PRR结构。通过建立平台的伪刚体模型及对其进行位姿分析, 获得了平台的正、逆解。同时, 运用有限元分析方法对平台进行了仿真分析。搭建了3-PRR平面三自由度纳米定位平台测试实验系统对所设计平台进行试验。实验结果显示: 3-PRR平台沿x轴、y轴的行程及最大转角分别为-11.32~11.41 μm、-12.47~12.76 μm、3.63′, 对应的分辨率分别为71 nm、83 nm、1.35″。理论分析结果、有限元仿真结果与实验结果的最大误差分别为587%、6.19%, 验证了理论分析和有限元仿真的正确性。x轴及y轴的位移输出与应变片的输出电压近似呈正比关系, 证实了利用应变片来检测3-PRR平台运动的可行性。

A 3-DOF nano-positioning platform detected by strain gauges driven by piezoelectric ceramics based on orientation of plate hinge, right angle flexure hinge and unilateral V-type hinge was designed. Pseudo-rigid-body model was established, and position analysis was conducted on it to obtain positive solution and inverse solution of the platform. Meanwhile, simulation analysis was conducted on the platform with finite elements analysis. Test experiment system of 3-DOF planar nano-positioning platform with 3-PRR structure was established. Experimental result indicates that travel ranges of 3-PRR platform along x-axis, y-axis and maximum rotary angle are respectively -11.32~11.41 μm, -12.47~12.76 μm, 3.63′, and corresponding resolution ratios are respectively 71 nm, 83 nm, 1.35″. Maximal errors of theoretical analysis and finite element simulation to experimental result are respectively 5.87%, 6.19% to verify correctness of theoretical analysis and finite element simulation. Displacement output of x-axis and y-axis is approximately proportional to output voltage of strain gauges, which verifies the feasibility to use strain gauges to detect movement of 3-PRR platform.