光学学报, 2017, 37 (11): 1131002, 网络出版: 2018-09-07   

基于超薄金属薄膜的超宽频太赫兹分束器 下载: 788次

Ultrawide-Band Terahertz Beam-Splitter Based on Ultrathin Metallic Films
作者单位
1 长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
2 中国科学院重庆绿色智能技术研究院跨尺度制造技术重庆市重点实验室, 重庆 400714
摘要
提出了一种以聚酯薄膜作为支撑的超薄金属薄膜太赫兹分束器结构,建立了该结构的基于传输矩阵理论的分束模型,分析了不同厚度金属Cr膜和聚酯薄膜对超宽频段太赫兹分束器的反射率、透射率和分束比的影响。理论结果表明,太赫兹分束器的分束性能受金属Cr膜厚度的影响较大,而受聚酯薄膜厚度的影响较小。在此基础上,制备了不同厚度金属Cr膜的太赫兹分束器件,并进行了分束实验,获得了与理论分析一致的实验结果,确定了1∶1分束比下的器件结构参数。
Abstract
A terahertz beam-splitter structure with polyester films as the support based on ultrathin metallic films is proposed, and the splitting model based on the transmission matrix theory is built. The influences of the metallic Cr films and the polyester films with different thicknesses on the reflectivity, transmissivity and splitting ratio of this ultrawide-band terahertz beam-splitter are also analyzed. The theoretical results show that the splitting performance of the proposed terahertz beam-splitter is relatively sensitive to the thickness of metallic Cr films but insensitive to the thickness of polymer films. On this basis, the terahertz beam-splitters with different thicknesses of metallic Cr films are fabricated and tested experimentally. The experimental results are consistent with those from theory analysis. The structural parameters of this device with a splitting ratio of 1∶1 are determined.

刘松林, 薄报学, 邹仪宣, 夏良平. 基于超薄金属薄膜的超宽频太赫兹分束器[J]. 光学学报, 2017, 37(11): 1131002. Songlin Liu, Baoxue Bo, Yixuan Zou, Liangping Xia. Ultrawide-Band Terahertz Beam-Splitter Based on Ultrathin Metallic Films[J]. Acta Optica Sinica, 2017, 37(11): 1131002.

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