光学与光电技术, 2017, 15 (5): 58, 网络出版: 2017-11-07   

纳秒激光打孔孔径随激光参数的变化规律

Diameter Changing Regularity with the Laser Parameters of Nanosecond Laser Drilling
作者单位
江苏大学材料科学与工程学院, 江苏 镇江 212013
摘要
由于具有较高的效率及可控的热影响,纳秒激光加工在工业中具有较大的应用潜力。该加工方式与具有超快特性的飞秒激光加工和具有准稳态特性的长脉冲激光加工都不同,其加工的结构同时与激光能量在材料中的传导过程、材料的去除过程和熔池内液态材料的喷溅过程相关,所以结构参数难以预测。基于激光的高斯光束特性推导了纳秒激光多脉冲加工微孔孔径随激光脉冲能量的变化规律,并通过纳秒激光在铝合金板上的实验对推导的规律进行验证。结果表明,激光加工微孔孔径随能量的变化规律基本满足R2∝ln(E);孔径随激光脉冲数量的增大而增大,但增大的趋势不明显;孔径随离焦距离的增大而增大。以上这些结果对激光打孔及激光珩磨等工艺一定指导意义。
Abstract
Due to the high efficiency and controllability of heat affected area, nanosecond laser processing has great potential applications in the industry. Different from both femtosecond laser processing which has super fast characteristics and long pulse laser processing with quasi steady state characteristics, the nanosecond laser processing is a complicated process that involves laser energy conduction in the material, the material removal and the molten material eruption, so the structure parameters of the processed hole are difficult to predict. In this paper, the structure change regularity along with the pulse energy changing when multiple pulse processing based on the Gaussian beam properties of the laser is derived. Then this derivation rule through the experiment of nanosecond laser on the aluminum alloy is verified. The results show that the radius of the hole fabricated by the nanosecond laser processing varies with the energy following with the relation of R2∝ln(E). The diameter of holes increases with the number of laser pulses. And the hole size increases with off focal distance. The above results have certain guidance for both laser drilling and laser honing.

邹振强, 李健, 胡璐瑶. 纳秒激光打孔孔径随激光参数的变化规律[J]. 光学与光电技术, 2017, 15(5): 58. ZOU Zhen-qiang, LI Jian, HU Lu-yao. Diameter Changing Regularity with the Laser Parameters of Nanosecond Laser Drilling[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2017, 15(5): 58.

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