光子学报, 2017, 46 (10): 1011002, 网络出版: 2017-11-24  

气动驱动渐变厚度变曲率反射镜技术

Pressurization Actuation Based Variable Curvature Mirror Having Variable Thickness
作者单位
1 中国科学院西安光学精密机械研究所 空间光学应用研究室, 西安 710119
2 中国科学院大学, 北京 100039
摘要
在完善基于有限元分析的跨平台综合优化流程的基础上, 获得了反射镜最优结构参数,并通过21阶Zernike多项式面形拟合得到球差是导致反射镜形变过程中面形精度退化的主导像差模式.根据有限元优化得到的最优结构参数研制了第二块气动驱动渐变厚度变曲率反射镜样片(口径135 mm, 中心厚度8 mm, 初始曲率半径2 807 mm)并进行了曲率变化能力及面形精度保持试验研究.研制工艺的改进使本文所研制的变厚铝合金反射镜初始面形精度优于λ/80(632.8 nm), 当驱动气压达到约0.07 MPa时, 反射镜中心形变量接近37 μm并且去掉球差影响后的面形精度可以优于λ/40(632.8 nm).与前期所研制的第一块样片相比, 第二块样片的中心形变能力以及面形精度保持能力均显著提升.
Abstract
The Finite Element Analysis(FEA)based optimization procedure aiming to obtain the optimum mirror parameters was first improved, it was found that the degradation of surface figure accuracy was mainly caused by spherical aberrations through Zernike polynomial surface fitting using 21 terms. After that, another duralumin prototype VCM (aperture 135 mm, central thickness 8mm and initial curvature radius 2 807 mm) was fabricated and tested. Because of the improvement of the fabrication process, the initial surface figure accuracy of the second mirror is superior to λ/80 (632.8 nm). When a pressure of about 0.07 MPa is imposed, the saggigus variation reaches nearly 37 μm and the corresponding surface figure accuracy is still superior to λ/40 (632.8 nm) with spherical aberrations removed. Compared with the first prototype VCM, the performance of the second one has been improved prominently.

赵惠, 解晓蓬, 许亮, 丁蛟腾, 刘美莹, 樊学武, 王亚军. 气动驱动渐变厚度变曲率反射镜技术[J]. 光子学报, 2017, 46(10): 1011002. ZHAO Hui, XIE Xiao-peng, XU Liang, DING Jiao-teng, LIU Mei-ying, FAN Xue-wu, WANG Ya-jun. Pressurization Actuation Based Variable Curvature Mirror Having Variable Thickness[J]. ACTA PHOTONICA SINICA, 2017, 46(10): 1011002.

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